Fedder G.K. – TechConnect Briefs

Mechanical Properties Measurements of 0.35-µm BiCMOS MEMS Structures

Liu J., Fedder G.K., Sassolini S., Sarkar N., Carnegie Mellon University, US

A new Young’s modulus test structure has been designed and used in our lab. Simple models have been built in simulating lateral and vertical stress gradients. Test structures, measurements and FEA simulations are reported on [...]

Design and fabrication of an integrated CMOS-MEMS 3-axis accelerometer

Xie H., Fedder G.K., Pan Z., Frey W., University of Florida, US

This paper reports a novel single structure, three-axis sensing accelerometer based on post-CMOS process. The resultant device incorporates both thin-film structures and bulk Si structures to achieve three-axis acceleration sensing without extra front-side lithography, or [...]

Design and fabrication of an integrated CMOS-MEMS 3-axis accelerometer

Xie H., Fedder G.K., Pan Z., Frey W., University of Florida, US

This paper reports a novel single structure, three-axis sensing accelerometer based on post-CMOS process. The resultant device incorporates both thin-film structures and bulk Si structures to achieve three-axis acceleration sensing without extra front-side lithography, or [...]

Actuation for Probe-Based Mass Data Storage

Alfaro J.F., Fedder G.K., Carnegie Mellon University, US

This paper describes the development of a micro media actuator (MMA) for probe-based mass data storage. The process is based on dry etching and incorporates a thinned silicon media sled to increase the frequency response [...]

Large-Deflection Beam Model for Schematic-Based Behavioral Simulation in NODAS

Jing Q., Mukherjee T., Fedder G.K., Carnegie Mellon University, US

MEMS design in NODAS is based on a geometrically intuitive schematic representation of MEMS using a small set of atomic elements (anchors, beams, plates and electrostatic gaps), each of which is associated with a geometrically [...]

Convergence and Speed Issues in Analog HDL Model Formulation for MEMS

Iyer S., Jing Q., Fedder G.K., Mukherjee T., ECE Department, Carnegie Mellon University, US

Behavioral simulation using high-level hardware description languages (HDLs) is becoming increasingly relevant for mixed-domain MEMS simulation. In this paper three issues which impact the convergence and simulation time in MEMS behavioral simulations are addressed. First, [...]

Macromodeling Temperature-Dependent Curl in CMOS Micromachined Beams

Iyer S., Lakdawala H., Fedder G.K., Mukherjee T., Carnegie Mellon University, US

Temperature sensitive curling is commonly observed in MEMS structures fabricated using a standard CMOS pro-cess. In this paper, a macromodel for vertical and lateral curling effects is derived by extending thermal multimorph theory for cantilever [...]

Low Order Squeeze Film Model for Simulation of MEMS Devices

Vemuri S., Fedder G.K., Mukherjee T., Carnegie Mellon Universtiy, US

A low-order behavioral squeeze film model of oscillating planar microstructures with critical dimensions in the range of a few microns is presented. Simulation results from this model are within 3% of those obtained from high-fidelity [...]

Simulation and Characterization of a CMOS Z-axis Microactuator with Electrostatic Comb Drives

Xie H., Erdman L., Jing Q., Fedder G.K., Carnegie Mellon University, US

This paper reports the first design and its simulation and experimental results of a CMOS z-axis microactuator that utilizes the vertical electrostatic forces existing between multi-conductor comb fingers. The measured maximum displacement of the z-axis [...]

Top Down Design of MEMS

Fedder G.K., Carnegie Mellon University, US

A top-down design flow for suspended MEMS is described, starting with schematic capture of a design topology, followed by behavioral simulation, layout generation, parasitic extraction, and final verification. Support for this flow requires a MEMS [...]