Farmer K.R. – TechConnect Briefs

Simulation and Modeling of a Bridge-type Resonant Beam for a Coriolis True Mass Flow Sensor

Lee S., Wang X., Shin W., Xiao Z., Chin K.K., Farmer K.R., Microelectronics Research Center, New Jersey Institute of Technology, US

This paper presents a simulation of a bridge-type resonating beam connected to the tube loop structure of a Coriolis true mass flow sensor[1]. The resonant beam technique, which is comparable to optical[2], piezoresistive[3], and capacitive[4] [...]

Resonant Frequency Shift of Torsional Acutators due to Electrostatic Force

Xiao Z., Sun Y., Li B., Lee S., Sidhu K.S., Chin K.K., Farmer K.R., New Jersey Institute of Technology, US

We have investigated the effect of natural frequency shift in single-crystal silicon, rectangular, electrostatic torsion actuators due to the electrostatic force. The electrostatic actuator was fabricated by using ultra-thin silicon wafer, SU-8 thermal compression bonding, [...]

A New Method to Design Pressure Sensor Diaphragm

Wang X., Li B., Lee S., Sun Y., Roman H.T., Chin K., Farmer K.R., New Jersey Institute of Technology, US

Over the last decade, silicon pressure sensors have undergone a significant growth. In most cases, these MEMS (Microelectromechanical System) devices are manufactured from rectangular or circular diaphragms whose thickness is constant and in the order [...]

Optimization of Thermally Actuated Bimorph Cantilevers for Maximum Deflection

Peng W., Xiao Z., Farmer K.R., New Jersey Institute of Technology, US

Theoretical analysis of thermally actuated bimorph cantilevers is presented to find the optimum condition for maximum deflection. The relations between material properties, dimensions and deflections are discussed in detail to understand the mechanism. Optimum condition [...]

Analytical and FEM Simulation Pull-in Study on Deformable Electrostatic Micro Actuators

Cheng J., Zhe J., Wu X., Farmer K.R., Modi V., Frechette L., Columbia University, US

In this paper, we employed an easy general theory [1, 2] over FEM simulation to carry out the pull in analysis of cantilever beam, fixed-fixed beam and circular membrane actuators and compare the results with [...]

Analytical Pull-in Study on Non-Deformable Electrostatic Micro Actuators

Zhe J., Wu X., Cheng J., Wang J., Farmer K.R., Frechette L., Modi V., Columbia University, US

A general theory and method was presented and employed to analyze the static behaviors of non-deformable electrostatic actuator systems with various electrode shapes. This method utilizes capacitance-based generalized equations and provides an easy and time [...]

Modeling and Simulation on Two Passive Feedback Methods to Obtain Large Travel Range of Electrostatic Micro Mirrors

Wu X.T., Xiao Z.X., Zhe J., Farmer K.R., New Jersey Institute of Technology, US

This paper demonstrates two passive feedback methods to obtain increased travel range in electrostatic micro actuators directly in the electrostatic domain. The first method is modeled as a series capacitor loop in which an integrated [...]