Application of Encapsulated PECVED-grown Carbon Nano-Structure Field-Emission Devices in Nanolithography
Koohsorkhi J., Adbi Y., Mohajerzadeh S., Derakhshandeh J., Hosseinzadegan H., Khakifirooz A., Robertson M.D., University of Tehran, IR
We report a novel technique for submicron and nanolithography using vertically grown nickel seeded carbon nano-structures (CNS) on silicon substrates. The field emission characteristic of carbon nano-tubes is utilized to create nano-scale features. The structure [...]