Design Optimization of Micromachined High Aspect Ratio 3D On-Chip Solenoid Inductor
We report the simulation work done by using Sonnet EMÔ on high aspect ratio (1:4 and 1:8) 3D on-chip air-core solenoid inductors. Simulations on 2, 3, and 5-turn inductors with 200 and 400 mm high [...]