Chigullapalli A. – TechConnect Briefs

Lumped Electro-Thermo-Mechanical Beam Model

Chigullapalli A., Purdue University, US

In this paper we present a lumped electro-thermo-mechanical beam model. Such a model is important for efficiently computing the deflection of an assemblage of mechanical beams that are subject to one or more applied voltages, [...]

Measuring System Mass and Density of MEMS by Electronic Probing

Chigullapalli A., Purdue University, US

In this paper we propose a method to measure the system mass and material density of a common type of micro electromechanical systems (MEMS). Measurement can be done on- or off-chip.To examine the feasibility of [...]