Design and Analysis of The CMOS Spatial Light Modulators with Flat Beam Profiles
Hsu C-P, Shih C-T, Wen S-Y, Chien Y-H, Hu C-C, Lee H.W., Industrial Technology Research Institute, TW
Two new types of electrostatic grating light modulators (GLMs) are proposed, designed, and analyzed here for improvement on optical wavefront distortion. The proposed GLMs consist different microbeam structures with spring-like legs to improve the flatness [...]