Chiang C.Y.T. – TechConnect Briefs

Two-Dimensional MOSFET Dopant Profile by Inverse Modeling via Source/Drain-to-Substrate Capacitance Measurement

Chiang C.Y.T., Yeow Y.T., Ghodsi R., University of Queensland, AU

This paper proposes and demonstrates a new approach to 2-dimensional dopant profile extraction for MOSFET's by treating the source/drain-to-substrate junction as a gated diode. The small-signal capacitance of the diode measured as a function of [...]