Chen J. – Page 2 – TechConnect Briefs

Comparative Studies of Novel Capacitive Transducers with Non-Planar Diaphragms

Chen J., Liu L., Li Z., Liu L., Tsinghua University, CN

Novel single-chip fabricated condenser structures with corrugated diaphragms for residual stress releasing have been proposed and simulated. An electrostatic-structural coupling FEM analysis has been performed to fully reveal the nonlinear relationship of output electrical signal [...]

Development of Patterned SMA Strips as Self-Heating Resistors

Chen J., Cheng X.L., Cai B.C., Xu D., Wang L., Cheng X.L., Shanghai Jiao Tong University, SG

A way to develop the pattern of shape memory alloys (SMA) titanium-nickel (TiNi) strips for improving the actuation performance of membrane microactuator is described in this paper. The patterned SMA strips serve not only as [...]

Electromechanical and Microwave S-parameter Properties of a Wide Tuning Range MEMS Tunable Capacitor

Chen J., Zou J., Liu C., Kang S-M, University of Illinois, CN

We present the electromechanical and microwave properties of a novel micromachined parallel-plate tunable capacitor with a wide tuning range. Different from conventional two-parallel-plate tunable capacitors, this novel tunable capacitor consists of one suspended top plate [...]

Techniques for Coupled Circuit and Micromechanical Simulation

Chen J., Kang S-M, University of Illinois at Urbana-Champaign, US

This paper details advanced simulation techniques for efficiently determining system behavior of integrated microsystems that contains both circuit elements and micromechanical ones. Techniques for building reduced-order dynamical models for coupled energy domain non-liner (both weakly [...]

Parameter Extraction for a Microwave Micromachined Switch

Chen J., Coperich K.M., Kang S-M, Schutt-Aine J., University of Illinois at Urbana-Champaign, US

This paper details new parameter extraction methods for microwave micromachined switches. Speciffically new methods for extracting switch turn-on and turn-off transient behavior and switch electromagnetic behavior are discussed. The accuracy of these methods are verified [...]