Chao C.H. – TechConnect Briefs

High-density Optical Disk Mastering Using Electron Beam Lithography with Modified LIGA Demolding Mechanism

Chao C.H., Pan C.T., National Sun Yat-Sen University, TW

In the study, a spiral nano-groove with 110nm in linewidth and 80nm in depth has been successfully fabricated. This method, Optical disk mastering using electron beam lithography, could provide about 50Gbytes storage capacity and is [...]

Microcap Selective Packaging through Flip Chip Alignment

Chao C.H., Pan C.T., National Sun Yat-Sen University, TW

In this study, the technique of microcap selective bonding for 3-D microstructures using MEMS processes was presented. The flip-chip assembly was successfully demonstrated that the microcap transferred on the selective area of the host substrate [...]