Chabal Y. – TechConnect Briefs

Patterned Atomic Layer Deposition on Scanning Tunneling Microscope constructed templates

Azcatl A., Ballard J., Chabal Y., Cho K.-J., Dick D., Owen J., Longo R., McDonnell S., Mordi G., Randall J., Wallace R., Zyvex Labs, US

This research shows a process combining STM lithography with the well controlled technique of ALD, indicating a new process for using single-pass STM patterning 3-D structures with sub-nanometer dimensional control. The templating was done using [...]

Detection of diffused III-V materials in high-k oxides during atomic layer deposition and annealing

Cabrera W., Dong H., Brennan B., O’Connor É., Carolan P., Galatage R., Monaghan S., Povey I., Hurley P.K., Hinkle C.L., Chabal Y., Wallace R.M., University of Texas at Dallas, US

In this study we look at the impact of ALD HfO2 and Al2O3 on both InGaAs and InP substrates, with the aim of determining if there is any diffusion of substrate atoms into the high-k [...]