Brueck R. – TechConnect Briefs

Methodology and tool support for micro- and nano product engineering for SMEs

Hahn K., Ortloff D., Mielke M., Brueck R., University Siegen, DE

The development of micro and nano tech devices such as MEMS (micro-electro-mechanical systems) and NEMS (nano-electro-mechanical systems) based on semiconductor manufacturing processes comprises the structural design as well as the definition of the manufacturing process [...]

A visual approach on MEMS process modeling using device cross-sections

Schmidt T., Mielke M., Hahn K., Ortloff D., Popp J., Brueck R., University of Siegen, DE

With MEMS entering fast moving consumer markets the need for more efficient design concepts becomes apparent. A technology centered approach where a product is designed around a highly specialized and optimized technology cannot cope with [...]