Brück R. – TechConnect Briefs

Web-Based Design Tools for MEMS-Process Configuration

Hahn K., Brück R., University of Siegen, DE

The micro electromechanical systems (MEMS) industry is characterized by small and medium sized enterprises (SMEs) specialized on products to solve problems in specific domains like medicine, automotive sensor technology, etc. In this field of business [...]

Layout Verification Tools for MEMS Physical Design

Hahn K., Brück R., Reusch B., Universitat Dortmund, DE

The impact of technoloDy related issues in microsystem physica] design is of hiah relevance due to the fact that mask layout and process configuration are strongly interdependant. Performing physical design in this area therefore means [...]