Micromachined Piezoresistive Tactile Sensor Array Fabricated by Bulk-etched MUMPs Process
Tuantranont A., Lomas T., Bright V.M., National Electronics and Computer Technology Center (NECTEC), TH
This paper discusses the design, fabrication and testing of a 5x5 micromachined tactile sensor array for the detection of an extremely small force (micrometer-Newton range). Central contacting pads that are trampoline-shape suspended structures and sensor [...]