Gas Sensor Arrays by Supersonic Cluster Beam Deposition
Barborini E., Leccardi M., Bertolini G., Rorato O., Franchi M., Bandiera D., Gatelli M., Wegner K., Raso A., Garibbo A., Ducati C., Piseri P., Milani P., Tethis S.r.l., IT
Supersonic cluster beam deposition was employed to produce nanostructured thin films of transition metal oxides to be used as gas sensors. The cluster beam was generated by a pulsed microplasma cluster source equipped with aerodynamic [...]