Atre A. – TechConnect Briefs

Design Optimization of a Surface Micromachined Electro-Thermal Beam Flexure Polysilicon Actuator

Atre A., Georgia Institute of Technology, US

Electro-thermal polysilicon actuators are widely employed in optical MEMS applications. These actuators are typically designed for maximum deflection (unloaded) or force (loaded) output characteristics. The optimal design methodology of the actuator has been investigated previously [...]

Effect of Thermophysical Property Variations on Surface Micromachined Polysilicon Beam Flexure Actuators

Atre A., Boedo S., Rochester Institute of Technology, US

Electrically heated, thermally driven, surface micromachined polysilicon beam flexure thermal actuators have been investigated using analytical methods that employ constant material properties either taken at room temperature or based on a set of averaged temperatures [...]