Insulator oxide film formation with acid catalyzed hydrolysis of alkoxides in supercritical fluid carbon dioxide
Wang J-S., Wai C.M., Brown G.J., Apt S.D., Campo A.M., Landis G.R., Air Force Research Laboratory, US
Insulator oxide films can be produced by hydrolysis of metal alkoxide precursors in the presence of an acid catalyst in supercritical fluid carbon dioxide(sc-CO2). In this study, a new process has been developed to cover [...]