Voxel-Based Heterogeneous Geometric Modeling for Surface Micromachined MEMS
Perrin A., Ananthakrishnan V., Gao F., Sarma R., Ananthasuresh G.K., University of Pennsylvania, 220 S. 33rd Street, US
A heterogeneous geometric modeler for microeletromechanical systmes (MEMS) is the focus of this paper. ON the basis of a comprehensive formalism describe in our earlier work, we present a 3-F implementation of the forward (from [...]