Advances in Helium Ion Microscopy for High Resolution Imaging and Material Modification
Thompson W., Notte J., Scipioni L., Ananth M., Stern L., Sijbrandij S., Sanford C., Carl Zeiss SMT, US
The helium ion microscope routinely obtains sub-nanometer resolution on uncoated soft materials with a high signal to damage ratio. In addition to its high resolution imaging capability, the microscope has been successful at sub-nanometer film [...]