Amon S. – TechConnect Briefs

Self Aligned Gate JFETs for Smart MEMS

Amon S., Vrtacnik D., Resnik D., Krizaj D., Aljancic U., Levstek A., University of Ljubljana, SI

Self Aligned Gate JFET (SJFET) devices and circuits are reported. The problem of electrical isolation between devices on the same chip is realized through Self Aligned Gate approach, enabling the application of standard bipolar discrete [...]