University of Waterloo – Page 3

A Novel Topology Optimization Scheme for Micro Electro-Thermo-Mechanical Domains

Motiee M., Khajepour A., Mansour R.R., University of Waterloo, CA

Developing a systematic approach to design optimum Micro-Electro-Mechanical Systems MEMS, recently has received a numerous attention among researchers. Duo to the lack of a systematic design method, typical MEMS devices design procedures encompass trial and [...]

New Analysis Method for Coupled-Field Micro Devices

Motiee M., Khajepour A., Mansour R.R., University of Waterloo, CA

MEMS actuators are typically used for either one time deployment of structures for automatic assembly or constant periodic actuation as in case of micro optic scanners. Electro-thermal actuators rely on the joule heating resulting small [...]

MEMS Sensors for Harsh Environment Applications

Nieva P.M., University of Waterloo, CA

Micro Electro Mechanical Systems (MEMS) for harsh environment applications are becoming increasingly important. They are recognized as essential for reducing weight and volume in strategic market sectors such as automotive, aerospace, turbomachinery, oil well/logging equipment, [...]

Modeling the Field Emission Current Fluctuation in Carbon Nanotube Thin Films

Sinha N., Roy Mahapatra D., Yeow J.T.W., Melnik R., University of Waterloo, CA

Carbon nanotubes (CNTs) are currently among the best field emitters for a variety of technological applications. However, from mathematical viewpoint, approach towards understanding the physics of nanotube based field emission of a thin film is [...]

A Multi-Purpose Optical MEMS Sensor for Harsh Environments

Nieva P., McGruer N., Adams G., University of Waterloo, CA

This paper presents the development and experimental analysis of a new multi-purpose optical MEMS (micro-electro-mechanical system) sensor for harsh environments. The sensor can be used as a displacement sensor, accelerometer, seismometer, and with some minor [...]

Modeling, Fabrication and Experiment of a Novel Lateral MEMS IF/RF Filter

Motiee M., Khajepour A., Mansour R.R., University of Waterloo, CA

MEMS based mechanical resonators and filters have shown promising characteristics in achieving high Q values and good stability. This paper introduces a novel V-shape coupling element that is used to mechanically couple two clamped-clamped MEMS [...]

Design and Modeling of a 3D Micromachined Accelerometer

Ghafari S.H., Golnaraghi M.F., Mansour R., University of Waterloo, CA

This paper presents the operation principles, modeling methods, design, and fabrication considerations of a 3-D micromachined accelerometer. MEMS technology in this work combines small size, low cost and low power consumption to create a sensor [...]