University of Toledo – TechConnect Briefs

Function-Oriented Geometric Design Approach To Surface Micromachined MEMS

Gao F., Hong Y.S., University of Toledo, US

Geometric modeling is an important aspect of MEMS design. It not only creates geometric model for visual evaluation, but also supplies input for device performance analysis. This paper focuses on developing a feature-based geometric design [...]

Effects of Steering in Metal Epitaxial Growth

Amar J., Yu J., University of Toledo, US

Recent experiments on metal epitaxial growth indicate that a high-angle of incidence the long-range attraction of the surface to incoming atoms can lead to steering effects near step-edges which significantly modify the growth and contribute [...]