University of Siegen – TechConnect Briefs

A visual approach on MEMS process modeling using device cross-sections

Schmidt T., Mielke M., Hahn K., Ortloff D., Popp J., Brueck R., University of Siegen, DE

With MEMS entering fast moving consumer markets the need for more efficient design concepts becomes apparent. A technology centered approach where a product is designed around a highly specialized and optimized technology cannot cope with [...]

Computer-Based Process Design Support for MEMS

Wagener A., Popp J., Schmidt T., Hahn K., University of Siegen, DE

A process management and development system for MEMS design is introduced. It allows the specification of processes for specific applications and the tracking of the development procedures. Unlike in microelectronics the process configuration for MEMS [...]

Web-Based Design Tools for MEMS-Process Configuration

Hahn K., Brück R., University of Siegen, DE

The micro electromechanical systems (MEMS) industry is characterized by small and medium sized enterprises (SMEs) specialized on products to solve problems in specific domains like medicine, automotive sensor technology, etc. In this field of business [...]