University of Illinois – Chicago

Synthesis and Electrical Characterization of Silicon Nanoparticles for Electronic Applications

Gopireddy D., Takoudis C.G., Gamota D., Zhang J., Brazis P.W., University of Illinois - Chicago, US

In an effort to assess their potential for future nanoelectronic devices, we have fabricated silicon nanoparticles field effect transistors with nanoparticles as the active channel. The nanoparticles of 10-20 nm diameters are grown on a [...]

Nitrous Oxide-Based Progressive Silicon Oxynitridation in Furnaces of Different Dimensions

Dang S.S., Takoudis C.G., University of Illinois - Chicago, US

As integrated device technologies enter the deep sub-half micron regime, there is a need for a corresponding reduction in the thickness of the dielectrics too. After formation of the dielectric film, maintenance of its characteristics [...]