Batch Fabrication of Nanostructured Heterogeneous Microarrays for Chemical Sensing
Barborini E., Leccardi M., Bertolini G., Rorato O., Repetto P., Bandiera D., Gatelli M., Raso A., Garibbo A., Seminara L., Ducati C., Milani P., Tethis srl, IT
Deposition of nanoparticles from the gas phase is becoming an enabling technology for batch production of nanostructured devices. Supersonic clusters beam deposition (SCBD) has been shown as a viable route for the production of nanostructured [...]