State University of New York at Binghamton

The Design, Fabrication and Characterization of A Novel Miniature Silicon Microphone Diaphragm

Cui W., Miles R.N., Su Q., State University of New York at Binghamton, US

A novel miniature silicon microphone diaphragm is described that is highly robust when subjected to stresses that may arise during the fabrication process. Residual stress produces major challenges in the fabrication of MEMS devices. This [...]

Novel Sensing Array Nanomaterials: Molecularly-Mediated Assemblies of Nanoparticles

Zhong C-J, Lu S., Luo J., Wang L., Shi X., Schadt M., Hao W., Luo J., State University of New York at Binghamton, US

Nanostructured sensing arrays combined with pattern-recognition analysis are expected to provide new opportunities for enhancing the design of sensor materials in terms of sensitivity and selectivity. We report findings of an investigation of nanostructured sensing [...]