Fabrication of Periodic Sub-100nm Patterns in SiO2 Template by Electron-beam Lithography
Chen A., Chen P., Chua S.J., Chen A., Chen P., Singapore-MIT Alliance, National University of Singapore (NUS), SG
We report on the fabrication process of SiO2 templates with periodic sub-100nm air hole patterns using electron beam (e-beam) lithography followed by reactive ion etching (RIE). Two-dimensional periodic air holes with sub-100nm dimensions were defined [...]