Oakland University – TechConnect Briefs

Design and Characterization of a Fully Differential Mems Accelerometer Fabricated Using METALMUMPS Technology

Qu P., Oakland University, US

As an exploratory study, this paper presents a fully differential single-axis accelerometer fabricated using MetalMUMPS process. The unique common-centriod wiring of the metal electrodes enables a fully differential sensing scheme with robust metal sensing structures. [...]

Design and Fabrication of a Metallic MEMS Gripper Using Electro-Thermal V-Shape and Modified U-Shape Actuators

Khazaai J.J., Qu H., Shillor M., Smith L., Oakland University, US

This abstract reports on the design, fabrication, and characterization of a distinctive MEMS gripper electro-thermally driven by the new metallic (electroplated nickel) V-shape actuator (VSA) and the modified U-shape actuators (mUSA). The VSA and the [...]

Design and Fabrication of a Low Power Electro-thermal V-shape Actuator With Large Displacement

Khazaai J., Oakland University, US

We propose the design and microfabrication of a V-shape MEMS electro-thermal actuator featuring large displacement generation and low power consumption. Electro-thermal MEMS actuators are suitable for a variety of applications where large forces and long [...]

Design and Microfabrication of an Electrostatically Actuated Scanning Micromirror with Elevated Electrodes

Haris M., Qu H., Jain A., Xie H., Oakland University, US

This paper reports the design and microfabrication of an electrostatically actuated CMOS-MEMS micromirror with elevated electrodes. Device structural design and fabrication process are detailed and device performance such as scanning angles is simulated using CoventorWare. [...]

Characterization of An Integrated 3-Axis CMOS-MEMS Accelerometer

Qu H., Fang D., Xie H., Oakland University, US

This paper reports an integrated 3-axis CMOS-MEMS accelerometer with single proof mass. Sensor design, fabrication process are introduced and detailed characterization of this small-sized accelerometer is addressed. Compared to the previously reported 3-axis accelerometers, most [...]

Bio-inspired Integrated Circuits for Signal Perception and Processing

Abdel-Aty-Zohdy H.S., Ewing R.L., Oakland University, US

Bio-inspired systems utilizing neural networks and genetic algorithms are presented in this paper for pattern discovery, identification, classification, and optimum choices for Signal Perception and Processing (SPP). Sample applications are presented for: (I) Integrated Intelligent [...]