National Electronics and Computer Technology Center (NECTEC)

Micromachined Piezoresistive Tactile Sensor Array Fabricated by Bulk-etched MUMPs Process

Tuantranont A., Lomas T., Bright V.M., National Electronics and Computer Technology Center (NECTEC), TH

This paper discusses the design, fabrication and testing of a 5x5 micromachined tactile sensor array for the detection of an extremely small force (micrometer-Newton range). Central contacting pads that are trampoline-shape suspended structures and sensor [...]

Micromachined Thermal Multimorph Actuators Fabricated by Bulk-etched MUMPs Process

Tuantranont A., Bright V.M., National Electronics and Computer Technology Center (NECTEC), TH

Micromachined thermal multimorph actuators for out-of-plane displacements have been designed and fabricated by Multi-Users MEMS Process (MUMPs) with a post-processing bulk etching step. Micromachined actuators have potential applications in microtransducers such as scanning tunneling microscope [...]