Simulation and Modeling of a Bridge-type Resonant Beam for a Coriolis True Mass Flow Sensor
Lee S., Wang X., Shin W., Xiao Z., Chin K.K., Farmer K.R., Microelectronics Research Center, New Jersey Institute of Technology, US
This paper presents a simulation of a bridge-type resonating beam connected to the tube loop structure of a Coriolis true mass flow sensor[1]. The resonant beam technique, which is comparable to optical[2], piezoresistive[3], and capacitive[4] [...]