Mesa+ Institute for Nanotechnology

Stretegies for fabrication of nanostructures using focused ion beam technology

Gadgil V.J., Mesa+ Institute for Nanotechnology, NL

Recently FIB is increasingly being used for fabrication of nanosturctures and rapid prototyping. In the area of optical sciences, FIB is used for fabrication of 2D and 3D photonic devices. One of the problems in [...]

Fabrication of 1D nanochannels with thin glass wafers for single molecule studies

Hoang H., Segers-Nolten I., Tas N., de Boer M., Subramaniam V., Elwenspoek M., Mesa+ Institute for Nanotechnology, NL

1D nanochannels are fabricated by direct bonding between the silicon wafer containing the nanochannels, microchannels, access holes and the blank thin glass of 170 µm thickness. The thin glass wafers are used as channel covers [...]