Israel Institute of Technology – TechConnect Briefs

Modeling the Electro-Thermal Response of Thermally Isolated Micromachined Distributed Structures

Socher E., Bochobza-Degani O., Elata D., Nemirovsky Y., Israel Institute of Technology, IL

This work analyzes the electro-thermal behavior of thermally isolated micromachined resistive structures. A novel numerical scheme for solving the coupled electro-thermal problem is suggested. The novel scheme can capture the thermal instabilities under both voltage [...]