Suppression of Variability in Metal Source/Drain SOI MOSFET with Partial Buried Oxide and δ-doping
Recently, metal source/drain (S/D) dopant-segregated Schottky barrier (DSSB) SOI MOSFET has attracted the attention of researchers due to its planar structure, CMOS compatibility and reduced S/D series resistance at thin SOI film. However, employing dopant-segregation [...]