Characterisation of Electrical Fields of Buried Interdigitated Nanoscale Ti-Electrode Arrays by a Novel Atomic Force Microscopy Measurement Procedure and Their Fabrication by FIB Milling
The fabrication and characterisation of interdigitated titanium nanoelectrode arrays with 500nm and 50nm width and spacing is described in this work. The electrical-field above the fabricated 500nm electrodes can be sensed by means of a [...]