Cornell University – Page 2 – TechConnect Briefs

The Monolithic Integration of 6H-SiC Electronics with 6H-SiC MEMS for Harsh Environment Applications

Hailu E., Atwell A.R., Duster J.S., Li C., Balseanu M., Kornegay K.T., Cornell University, US

We report the development of a design and fabrication methodology for the first monolithic integration of silicon carbide (SiC) MEMS sensors with SiC-based electronic amplification and control circuitry. MEMS and circuit integration on silicon has [...]

Investigation of the Order Continuum of Quenched Silicon using Accelerated Molecular Dynamics Techniques

Choudhary D., Clancy P., Cornell University, US

The thermodynamic, electronic and structural properties of silicon phases are inextricably linked to the underlying order in the material. While the crystalline and amorphous phases are well characterized, the existence of a glassy silicon phase [...]

Simulation and Validation of Bulk Micromachined 6H-SiC High-g Piezoresistive Accelerometer

Atwell A.R., Okojie R.S., Kornegay K.T., Roberson S., Beliveau A., Cornell University, US

Quantum effects have been reported to play an important role in the operation of narrow width SOI devices, in which the carriers experience a two dimensional confinement in a square quantum well at the semiconductor-oxide [...]

Evaluating Adhesion Strength of Biological Molecules to Nanofabricated Structures

Soong R.K., Stelick S.J., Bachand G.D., Montemangno C.D., Cornell University, US

Our research efforts are aimed at developing a new class of nanoscale mechanical devices powered by biomolecular motors.Currently, advanced techniques are being employed for creating nanofabricated substrates that provide precise positioning and orientation of the [...]

Optimal Shape Design of Three-Dimensional MEMS with Applications to Electrostatic Comb Drives

Ye W., Mukherjee S., Cornell University, US

A methodology for solving inverse problems in Microelectromechanical (MEM) systems is proposed in this paper. Design of variable shape electrostatic comb drives (shape motors), in order to obtain desired force profiles, is presented as an [...]