Country: DK

The paper reports an automated method for the synthesis of multi-material, multi-degree-of-freedom micro actuators. The method is based on topology optimization, an iterative computational scheme consisting of alternating finite element analyses, sensitivity analyses and optimal [...]

Design methods for MicroElectroMechanical Svstems (MEMS) have, until now, typically been based on intuition, experience and triai and error approaches. A method which may be used to design mechanical and electromechanical coupling parts of MEMS [...]