Lu M.S., Fedder G.K.
Carnegie Mellon University, US
Keywords: CAD, Layout, MEMS, methodology, optimization, synthesis
VLSI system designers can begin their design process with a behavrioal description of a system, then proceed to physical design. MEMS designers typiclly begin with device design, this process is opten followed by several fabrication iterations for device characterization, and the rest of the system-the electronics and packaging-are layered on top of the device in successive design iterations. THis methodology results in long design cycles and is very costly. A more structred approach to MEMS CAD would permit th edesigner to specify system level performance goals and then propagate those
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 1999 International Conference on Modeling and Simulation of Microsystems
Published: April 19, 1999
Pages: 280 - 283
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-9666135-4-6