Brugger H., Maier C., Hofer E.P.
University of Ulm, DE
Keywords: dynamic processes in microsystems, high speed visualization
For the real time visualization of the dynamics of MEMS it is often inevitable to use high speed camera systems because of the optical enlargement. The micro diagnostic system MinVis, which consists of a miniaturized optical setup with a commercial microscope objective and a high performance AlInGaP LED as pulsed light source allows the investigation of these highly dynamic processes in microsystems in real time, and represents an economical alternative to complex and very expensive high speed camera systems. The application of MinVis covers a wide range from diagnostic measurements during the prototype development to inspections for the quality assurance of microsystems. As an easily transportable setup MinVis is also particularly suitable for presentation purposes.
Journal: TechConnect Briefs
Volume: 3, Technical Proceedings of the 2004 NSTI Nanotechnology Conference and Trade Show, Volume 3
Published: March 7, 2004
Pages: 476 - 479
Industry sector: Advanced Materials & Manufacturing
Topic: Advanced Manufacturing
ISBN: 0-9728422-9-2