Papers:
Dynamic Analysis of an Electrostatic Micropump
In this paper, a micropump actuated by electrostatic force is dynamically analysed. Mathematical model is established to evaluate the dynamic response of the micropump. Electro-mechanical coupling effect is considered in evaluating the electrostatic force applied [...]
Numerical Simulation of Pulse-Width-Modulated Micropumps with Diffuser/Nozzle Elements
This paper presents the numerical simulation of a new control method for dynamic micropumps with diffuser/nozzle elements: the pulse-width-modulation (PWM) of the drive signal. A piezo disk with a square wave signal actuates the pump, [...]
Thermal Management of Micro-Hotplates using MEMCAD as Simulation Tool
In this paper we report on the electrothermal simulations performed in the aim of optimising the power consumption and the temperature distribution of micro-hotplates for gas sensing applications. The micro-hotplate designs were optimised using the [...]
Simulation of Heat-Transfer Enhancement Effects in Microreactors
Sate-of-the-art microstructuring techniques allow to model the interface for heat and mass transfer in miniaturized reactions systems on a micrometer scale. In this context, two different approaches for heat transfer enhancement are presented. The ideas [...]
Simulation and Experimental Verification of Micro Polymerase Chain Reaction Chip
This study used finite element analysis to simulate the temperature characteristics of a micro polymerase chain reaction (PCR) chip. The micro-PCR chip was fabricated on a silicon wafer and Pyrex glass using photolithography, wet etching, [...]
Modelling of Integrated Peltier Elements
On-chip integration of Peltier devices creates a number of additional parasitics, compared to conventional Peltier devices. The most important are thermal conduction through the supporting membrane and contact resistance. Analytical analysis shows that each parasitic [...]
Journal: TechConnect Briefs
Volume: Technical Proceedings of the 2000 International Conference on Modeling and Simulation of Microsystems
Published: March 27, 2000
Industry sector: Sensors, MEMS, Electronics
Topics: Micro & Bio Fluidics, Lab-on-Chip, Modeling & Simulation of Microsystems
ISBN: 0-9666135-7-0