Yarberry V.R., Jorgensen C.R.
Sandia National Laboratories, US
Keywords: cross-section, MEMS, process simulation, Summit
This paper describes the 2D Process Visualizer, a CAD tool that enables a SUMMiT (Sandia Ultra-Planar Multilevel MEMS Technology) MEMS designer to visualize the results of applying the process sequence to a mask set by generating accurate 2D cross-section
Journal: TechConnect Briefs
Volume: 1, Technical Proceedings of the 2001 International Conference on Modeling and Simulation of Microsystems
Published: March 19, 2001
Pages: 606 - 609
Industry sector: Sensors, MEMS, Electronics
Topic: Modeling & Simulation of Microsystems
ISBN: 0-9708275-0-4