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Home2012June

Month: June 2012

TechConnect Proceedings Papers

A nanoscale machine shop for NWs

Cheng G.J., Li Ji, Purdue University, US
One-dimensional nanomaterials have attracted a great deal of research interest in the past few decades due to their unique mechanical, electrical and optical properties. Changing the shape of nanowires (NWs) is both challenging and crucial [...]

All polymer, injection molded nanoslits, fabricated through two-level UV-LIGA processes

Østergaard P.F., Mateucci M., Marie R., Kristensen A., Taboryski R., Technical University of Denmark, DK
Micro- and nanofluidic systems fabricated in silicon and glass substrates are expensive and have long production cycles. To minimize the time used by researchers to fabricate their systems, rather than using them, medium to high [...]

Directed Self Assembly: a Novel, High Speed Method of Nanocoating Ultra-thin Films and Monolayers of Particles

Powch G.A., Jain A.R., VersuFLEX Technologies LLC, US
A novel, practical fluidic method is presented for coating ultra-thin, ultra-uniform layers and realizing self-assembled monolayers of particles, into nanoscale in atmosphere and room temperature at rates scalable to web processes at >4 m/min. A [...]

A Pressure Controlled Pinched Flow Fractionation Device for Continuous Particle Separation

Trosborg J., Christiansen T.L., Technical University of Denmark, DK
A demonstration of a pinched flow fractionation device that enables pressure controlled tuning of the separation range of particles. This makes the device ready for easy and cheap mass-production, maintaining great flexibility, and rendering the [...]

Towards nanofabrication with UV femtosecond fiber laser

Huang H., PolarOnyx, Inc., US
In this paper, a UV fs fiber laser was used for direct writing nanofabrication on different materials. The laser used is a commercialized mode-locked fiber laser (PolarOnyx Uranus Series), generating typically Gaussian shape pulses (750 [...]

Milling Process Control with Dimensional Feedback on a Focused Ion Beam – Scanning Electron Microscope System (FIB-SEM)

Sanabia J.E., Raith USA, Inc., US
In nanofabrication and nanoanalysis, focused ion beam – scanning electron microscope (FIB-SEM) systems are increasingly used for demanding patterning tasks which rely on precise pattern placement and/or dimension control. Easily verifying and correcting for patterning [...]

Design and Fabrication of a Large Scale Electric Field Array Device for Directed Self-Assembly of Multilayer BioDerivatized Nanoparticle Materials

Heller M.J., Song Y., University of California San Diego, US
In earlier work, an electronic microarray device was used to carry out a bottom-up approach for the directed self-assembly of higher order 3D structures from biotin/streptavidin, DNA and enzyme derivatized nanoparticles. Structures with up to [...]

Impact of Channel Length and Gate Width of a N-MOSFET Device on the Threshold Voltage and its Fluctuations in Presence of Random Channel Dopants and Random Interface Trap: A 3D Ensemble Monte Carlo Stud

Ashraf N., Joshi S., Vasileska D., ASU, US
Previously we have reported threshold voltage fluctuations caused by presence of random distribution of dopant ions in the channel region of a 45 nm n-MOSFET and random single interface trap positioned from source to drain [...]

Experimental analysis of the MEMS Capacitive accelerometer’s shock resistibility

Tao Y., Liu Y., Dong J., Tsinghua University, CN
The shock resistibility of MEMS device has been an urgent issue in the field of consumer electronics, automotive industry and special military applications. The paper analyses experimentally the shock resistibility of a typical MEMS capacitive [...]

Detecting Defects over the Whole Surface of Wafer by Non-destructive and Non-contact Pulse Photoconductivity Method (PPCM)

Ndagijimana J., Soh Y., Kubota H., Kobayashi K., Kumamoto University, JP
With the miniaturization of CMOS, the gate insulator has extremely become thin until reaching the EOT (equivalent oxide thickness) of less than 1nm in order to keep maintaining high-speed performances of devices and low electric [...]

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